Analyse chimique des surfaces — Vocabulaire — Partie 3: Termes utilisés dans l'analyse des interfaces optiques
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Reference:
ISO 18115-3:2022
Publication Year:
2022
Domain:
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
28 000 F CFA
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