Analyse chimique des surfaces — Modes opératoires généraux pour le profilage en profondeur compositionnel quantitatif par spectrométrie d'émission optique à décharge luminescente

ISO 11505:2013 describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.

It is limited to a description of general procedures of quantification of GD-OES and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.